TAGS: Electrical & Electronics High Heat Materials
Solvay, a global supplier of specialty materials, is taking the opportunity of this year’s Semicon Taiwan show in Taipei to present its advanced materials portfolio for the global semiconductors industry.
Extensive Range of Specialty Polymers
From September 14 to 16 at Booth N0584, the company will highlight its comprehensive offering of specialty polymers and chemicals covering all stages of front-end-of-line (FEOL) and back-end-of-line (BEOL) semiconductor manufacturing, testing and assembly.
From high-performance polymers to slurry abrasives, gases, and wet chemicals, the company’s material solutions are engineered to meet the unique and complex needs of manufacturers in this dynamic market and push the limits of chip performance with outstanding purity, long-lasting chemical stability and optimized resistance to high temperatures and plasma.
A wide range of structural and internal parts molded in
KetaSpire® PEEK,
Torlon® PAI,
Halar® ECTFE,
Hyflon® PFA and MFA,
Solef® PVDF and
Algoflon® PTFE demonstrate the perfect fit of Solvay’s specialty polymers in FEOL processes such as dry and wet etching, cleaning, chemical vapor deposition (CVD), chemical mechanical planarization (CMP) and lithography. Furthermore,
Tecnoflon® FFKM is used for O-rings and seals, Fluorolink
® for CMP pads,
Fomblin® PFPE serves as a lubricant in vacuum pumps, and Galden
® PFPE ensures proper heat transfer in chillers.
Many of these materials also extend into wafer handling, duct coating, filters, piping and tubing as well as BEOL processes from wafer level packaging (WLP) to probing and testing. The portfolio is complemented by dedicated specialty chemicals such as Sifren
® C
4F
6 cleaning gas for etching, Interox
® H
2O
2 hydrogen peroxide for optimized wet etching and Cypure
® PH
3 cylindered phosphine dopant gas.
In addition, Solvay has confirmed its active commitment to the semiconductors industry with a new joint venture – Shinsol Advanced Chemicals – for the development, production and marketing of electronic-grade hydrogen peroxide, located close to the Southern Taiwan Science Park near Tainan and scheduled to begin operations in 2023.
Source: Solvay
