The new engineering materials powerhouse

by SpecialChem

PFX 9020

PFX 9020 is an ultra-high pure, ultra-clean perfluoroelastomer (FFKM) by NEXA, reinforced with a fluorinated nano-filler. Offers ultra-low particle generation, outstanding compression-set even at very high temperature and unique cross-linking. Provides high temperature-, chemical-, solvent-, plasma- and steam resistance. PFX 9020 is used in HDPCVD, PECVD, SACVD & metal CVD etching, ashing process, plasma & gas deposition and semiconductor sealing applications.

PFX 9020 Properties

Mechanical Properties

Value & Unit

Test Condition

Test Method

Durometer Hardness (Shore)

(Shore A, 6 mm)

DIN 53505

100% Modulus

4 MPa

(S2)

DIN 53504

Tensile Strength

17 MPa

(S2)

DIN 53504

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