by SpecialChem

Semitron® MPR1000

Technical Datasheet | Supplied by Mitsubishi Chemical Advanced Materials

Semitron® MPR1000 by Quadrant is a durable and machinable thermoplastic grade developed for semiconductor applications. It exhibits excellent longevity, excellent heat resistance, low ionic metal content and low out-gassing. It possesses low rate of erosion in plasma chambers and excellent chip resistance. Semitron® MPR1000 is recommended for plasma based vacuum chambers such as Etch, CVD & ion implant. It is used in clamp rings, trench rings, screws, pins, shower heads, centering pins, focus rings, insulators, vacuum pads and wafer guides.

Semitron® MPR1000 Properties

Physical Properties

Value & Unit

Test Condition

Test Method

Specific Gravity

1.48

(73˚F)

ASTM D792

Water Absorption

0.28 %

(24 Hours)

ASTM D570

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