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Tecnoflon® PFR 5910M / PFR 5920M

Technical Datasheet | Supplied by Syensqo

Tecnoflon® PFR 5910M / PFR 5920M by Syensqo is a highly pure perfluoroelastomer (FFKM). It contains nanoparticles of polytetrafluoroethylene (PTFE) which acts as organic filler. It exhibits very good oxygen and fluorine plasma resistance, very low particle generation and low outgassing. Shows excellent mechanical and sealing properties. Offers low friction, high abrasion & chemical resistance and low modulus. Suitable for dry (plasma etching, PECVD, LPCVD, metal CVD, PVD, ALD, plasma cleans) and wet semiconductor processes (wafer cleaning, polymer removal, wet etching, polishing). Tecnoflon® PFR 5910M / PFR 5920M is designed for semiconductor manufacturing applications like chamber seals, lid seals, window seals, gas inlet seals, fitting seals, slit valve gates, lip seals and wafer handling parts.

Tecnoflon® PFR 5910M / PFR 5920M Properties

Mechanical Properties

Value & Unit

Test Condition

Test Method

Compression Set

20 %

(25% Deformation (O-Ring #214), 70 h at 200°C)

ASTM D395-B

Elongation at Break

285 %

(At 230°C, Post cure: (8+16) h)

ASTM D412-C

100% Modulus

2.5 MPa

(At 230°C, Post cure: (8+16) h)

ASTM D412-C

*The last time this product was checked, its availability could not be confirmed. If you have more information about its availability, please contact us.

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